Enhanced Ferroelectric Properties of Pb(Hf0.3Ti0.7)O3 Thin Films by SrRuO3 Bottom Electrode

被引：1

作者：

Lin, Yali ^{[1
]}

Zhu, Jun ^{[1
]}

Wu, Zhipeng ^{[1
]}

Luo, Wenbo ^{[1
]}

Li, Yanrong ^{[1
]}

机构：

[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China

来源：

FERROELECTRICS | 2016年 / 492卷 / 01期

基金：

美国国家科学基金会;

关键词：

PHT; Pt; SrRuO3; figure; leakage current density; ELECTRICAL-PROPERTIES;

D O I：

10.1080/00150193.2015.1072680

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Lead Hafnate-Titanate, Pb(Hf0.3Ti0.7)O-3 (PHT), films were fabricated by PLD on Al2O3 (0001) substrates with Pt or SrRuO3 (SRO) bottom electrodes, respectively. There is a certain amount of pyrochlore phase in PHT films on Pt/Al2O3. In contrast, the PHT films on SRO/Al2O3 show pure pervoskite phase. Furthermore, the PHT thin films on SRO/Al2O3, show uniform gain size and significantly enhanced ferroelectric properties with larger remnant polarization (2Pr = 59.1C/cm(2)), better fatigue endurance and lower leakage current density (8.5 x 10(-8)A/cm(2) at 150kV/cm). With the enhanced properties, PHT ferroelectric film on SRO electrode could be a promising structure which can be applied in FeRAM.

引用

页码：143 / 149

页数：7

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