Electrical and optical properties and applications of diamond-like carbon

The diversity of techniques used for the deposition of amorphous hydrogenated or non-hydrogenated forms of diamond-like carbon films results in a group of materials characterized by a large range of attractive mechanical, tribological, optical and electrical properties. These characteristics can further be modified by incorporation of different elements such as N, F, Si, or metals. By choosing the appropriate technique and film composition, it is possible to tailor their properties according to specific needs and potential applications. The optical gap of the diamond-like carbon is in the range of 1-4 eV, the electrical resistivity spans 14 orders of magnitude, and the dielectric constant of the films covers the range of 2.5-6. The paper reviews the optical and electrical characteristics of DLC and discusses the actual and potential applications based on these properties.