Model-based adaptive non-null interferometry for freeform surface metrology

被引：14

作者：

Zhang, Lei ^{[1
]}

Zhou, Sheng ^{[1
]}

Li, Dong ^{[2
]}

Li, Jingsong ^{[1
]}

Yu, Benli ^{[1
]}

机构：

[1] Anhui Univ, Minist Educ, Key Lab Optoelect Informat Acquisit & Manipulat, Hefei 230601, Anhui, Peoples R China

[2] China Acad Engn Phys, Res Ctr Laser Fus, Mianyang 621900, Peoples R China

来源：

CHINESE OPTICS LETTERS | 2018年 / 16卷 / 08期

基金：

国家重点研发计划; 中国国家自然科学基金;

关键词：

REVERSE OPTIMIZATION RECONSTRUCTION; OPTICS;

D O I：

10.3788/COL201816.081203

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A model-based adaptive non-null interferometry (MANI) is proposed for steep optical freeform surfaces in situ testing. The deformable mirror (DM) affording the flexible compensation is monitored with the beam in the interferometer by a wavefront sensor. The residual wavefront aberration in the non-null interferogram is eliminated by the multi-configuration ray tracing algorithm based on the system model, especially the DM surface model. The final figure error can be extracted together with the surface misalignment aberration correction. Experiments proving the feasibility of the MANI are shown.

引用

页数：5

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