Characterization of an RF excited broad beam ion source operating with inert gases (vol 129, 223305, 2021)

被引：0
|
作者：
Rohkamm, Erik [1 ]
Spemann, Daniel [1 ]
Scholze, Frank [1 ]
Frost, Frank [1 ]
机构：
[1] Leibniz Inst Surface Engn IOM, Permoserstr 15, D-04318 Leipzig, Germany
来源：
JOURNAL OF APPLIED PHYSICS | 2022年 / 131卷 / 12期
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D O I：
10.1063/5.0089145
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页数：1
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