Formation of atomically smooth surfaces on SrTiO3 substrates for epitaxial film growth

被引：7
|
作者：
Liu, LF
Lu, HB
Fei, YY
Guo, HZ
Xiang, WF
Chen, ZH
机构：
[1] Chinese Acad Sci, Inst Phys, Lab Opt Phys, Beijing 100080, Peoples R China
[2] Chinese Acad Sci, Ctr Condensed Matter Phys, Beijing 100080, Peoples R China
来源：
JOURNAL OF CRYSTAL GROWTH | 2003年 / 253卷 / 1-4期
关键词：
substrates; surface processes; laser epitaxy; perovskites;
D O I：
10.1016/S0022-0248(03)01093-5
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
Preparation of atomically smooth SrTiO3 substrates is a crucial step for fabricating various high-quality thin films. This step can be in situ accomplished by homoepitaxial growth of several unit cells of SrTiO3 on commercially available substrates using laser molecular-beam epitaxy. The atomic-level smoothness of as-treated substrates was verified by AFM image and well-defined intensity oscillation in reflection high-energy electron diffraction. This simple procedure can be applied to epitaxy of several kinds of oxide films. (C) 2003 Elsevier Science B.V. All rights reserved.
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收藏
页码：374 / 377
页数：4
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