Novel Thermal Flow Sensors Based on a Wheatstone Bridge Read-out

被引：8
|
作者：
Talic, A. [1 ]
Cerimovic, S. [1 ]
Beigelbeck, R. [1 ]
Kohl, F. [1 ]
Jachimowicz, A. [2 ]
Keplinger, F. [2 ]
机构：
[1] Austrian Acad Sci, Inst Integrated Sensor Syst, Viktor Kaplan Str 2, A-2700 Wr Neustadt, Austria
[2] Vienna Univ Technol, Inst Sensor & Actuator Syst, A-1040 Vienna, Austria
来源：
PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE | 2009年 / 1卷 / 01期
关键词：
flow sensor; Finite Element Method; Wheatstone bridge configuration; heat transfer module;
D O I：
10.1016/j.proche.2009.07.034
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
A novel thermal flow sensor transduction method is presented combining advantages of the calorimetric and the hot-film transduction principle. Four thin-film germanium thermistors are embedded in the silicon-nitride membrane acting as heat sources and as temperature sensors simultaneously. These devices operate in a Wheatstone bridge. The voltage across the bridge as well as the total dissipated power serves as output quantities. Two sensor configurations with different arrangement of the membrane thermistors were examined experimentally. Moreover, we investigated the influence of different layouts on the rise time, the sensitivity, and the usable flow range by means of two-dimensional finite element simulations.
引用
收藏
页码：136 / +
页数：2
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