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- [22] Atomic layer deposition of tantalum oxide with controlled oxygen deficiency for making resistive memory structures Russian Journal of Applied Chemistry, 2016, 89 : 1825 - 1830
- [23] Atomic layer deposition of tantalum oxide with controlled oxygen deficiency for making resistive memory structures Russian Journal of Applied Chemistry, 2016, 89 (11): : 1825 - 1830