共 50 条
- [42] In situ and ex situ quantification of nanoparticle fluxes in magnetron sputter inert gas condensation: A Cu nanoparticle case study JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2024, 42 (02):
- [45] Mechanism of Sputtering Mode of Surface Particles in Magnetron Sputtering with Ti Target Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering, 2022, 51 (09): : 3276 - 3281
- [46] PREPARATION OF NBN BY REACTIVE MAGNETRON SPUTTERING USING NE AND KR INERT DILUENTS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (03): : 1257 - 1260
- [47] VACUUM SPUTTERING OF METALLIC SODIUM BY INERT GAS IONS PHYSICAL REVIEW, 1953, 92 (02): : 535 - 536
- [49] Composition and formation mechanism of zirconium oxynitride films produced by reactive direct current magnetron sputtering PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2004, 201 (05): : 967 - 976