Vertically integrated sensors for advanced imaging applications

被引:18
|
作者
Benthien, S [1 ]
Lulé, T
Schneider, B
Wagner, M
Verhoeven, M
Böhm, M
机构
[1] Silicon Vis GmbH, D-57078 Siegen, Germany
[2] Univ Gesamthsch Siegen, Inst Halbleitertech, D-57068 Siegen, Germany
关键词
amorphous silicon; APS; high dynamic range; image sensor; TFA;
D O I
10.1109/4.848201
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A thin film on ASIC (TFA) image sensor is fabricated depositing an amorphous silicon thin-film detector onto a CMOS ASIC, With regards to advanced imaging systems, TFA provides enhanced performance and more flexibility than conventional technologies. Extensive on-chip signal processing is feasible, as well as small pixels for high-resolution imagers, Two new TFA imager prototypes have recently been fabricated, High-resolution image sensor (HIRISE II) with 1024 x 128 pixels is an active pixel sensor suited for digital photography. Local autoadaptiver sensor (LARS II) with 368 x 256 pixels splits the illumination information into two signals, thereby providing a dynamic range of more than 120 dB, as required by automotive applications, Both prototypes include correlated double sampling and double delta sampling for efficient suppression of fixed pattern noise.
引用
收藏
页码:939 / 945
页数:7
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