Characteristics of Coplanar Waveguide of Small Cross Section on BCB with Coplanar Ground to Conductor-Backed Plane Interconnection

被引：4

作者：

Grimault-Jacquin, Anne-Sophie ^{[1
]}

Zerounian, Nicolas ^{[1
]}

Omar, Imene Kaid ^{[1
]}

Crozat, Paul ^{[1
]}

Amar, Farah ^{[1
]}

Villebasse, Cedric ^{[1
]}

Bouville, David ^{[1
]}

Hamouda, Frederic ^{[1
]}

Aniel, Frederic ^{[1
]}

机构：

[1] Univ Paris Saclay, Univ Paris Sud, CNRS, UMR 9001,Ctr Nanosci & Nanotechnol, 10 Bd Thomas Gobert, F-91120 Palaiseau, France

来源：

JOURNAL OF INFRARED MILLIMETER AND TERAHERTZ WAVES | 2019年 / 40卷 / 10期

关键词：

Transmission lines; THz coplanar waveguides; Submillimeter wave waveguides; Polymer dielectric; FILM MICROSTRIP LINES; MILLIMETER-WAVE; CPW; BENZOCYCLOBUTENE; LAUNCHER;

D O I：

10.1007/s10762-019-00624-x

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Conductor-backed coplanar waveguide on 30-mu m-thick BCB polymer is fabricated. In order to eliminate unwanted propagation modes for these lines designed for frequencies up to 1 THz, electroplated vias interconnect each coplanar ground to the backed conductor. Transmission line properties are extracted here up to 67 GHz, showing a characteristic impedance of about 50 omega, but with high conduction losses for this frequency range due to the thin metal layer used. Thru-reflect-line correction and a de-embedding with electrical circuit of accesses are applied to extract line properties. The comparison with a coplanar waveguide model leads to a relative permittivity of 2.676 for the BCB in this low-frequency range.

引用

页码：1010 / 1020

页数：11

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