Two modes of laser lithography fabrication of three-dimensional submicrometer structures

被引：2

作者：

Shishkin, I. I. ^{[1
,2
]}

Samusev, K. B. ^{[1
,2
]}

Rybin, M. V. ^{[1
,2
]}

Limonov, M. F. ^{[1
,2
]}

Kiyan, R. V. ^{[3
]}

Chichkov, B. N. ^{[3
]}

Kivshar', Yu. S. ^{[1
,4
]}

Belov, P. A. ^{[1
]}

机构：

[1] ITMO Univ, St Petersburg 197101, Russia

[2] Russian Acad Sci, AF Ioffe Phys Tech Inst, St Petersburg 194021, Russia

[3] Laser Zentrum Hannover, D-30419 Hannover, Germany

[4] Australian Natl Univ, Res Sch Phys & Engn, Nonlinear Phys Ctr, Canberra, ACT 0200, Australia

来源：

PHYSICS OF THE SOLID STATE | 2014年 / 56卷 / 11期

基金：

俄罗斯基础研究基金会;

关键词：

2-PHOTON POLYMERIZATION;

D O I：

10.1134/S1063783414110262

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

The modes of laser lithography fabrication of three-dimensional submicrometer structures have been studied. The method is based on the effect of threshold two-photon polymerization of a photosensitive material at the laser beam focus. To determine the lithograph workspace in the coordinates "laser power-speed of the sample displacement with respect to the laser focus," a series of photonic crystals with the woodpile structure is prepared. Two methods for fabricating three-dimensional structures, i.e., raster scanning and vector graphics (or the vector method) are analyzed in detail. The advantages of the vector method for fabricating periodic structures are demonstrated using crystals of inverted yablonovite as an example. The prepared samples are studied by scanning electron microscopy.

引用

页码：2166 / 2172

页数：7

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