Electrochemical properties of amorphous nitrogen-containing hydrogenated diamondlike-carbon films

被引:4
|
作者
Pleskov, YV
Krotova, MD
Polyakov, VI
Khomich, AV
Rukovishnikov, AI
Druz, BL
Zaritskii, IM
机构
[1] Russian Acad Sci, AN Frumkin Electrochem Inst, Moscow 117071, Russia
[2] Russian Acad Sci, Inst Radio Engn & Elect, Moscow 103907, Russia
[3] Veeco Instruments Inc, Plainview, NY 11803 USA
基金
俄罗斯基础研究基金会;
关键词
Diamondlike Carbon; Deep Level Transient Spectroscopy; Film Bulk; Film Resistivity; Point Defect Concentration;
D O I
10.1007/BF02757514
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
The electrochemical impedance of thin-film electrodes made of amorphous nitrogen-containing diamondlike carbon (a-C:N:H) in H2SO4 solutions and the kinetics of redox reactions on these electrodes in the Fe(CN)(6)(3-/4-) system are studied. The amorphous diamondlike carbon films with an admixture of nitrogen are grown by a directed deposition from inductively coupled methane-nitrogen plasma. The films' resistivity values determined from the ac impedance of a-C:N:H/electrolyte contact practically coincided with those determined from the current-voltage curves taken at the a-C:N:H/metal contact. With an increase in the nitrogen : methane ratio in the gas phase, both the electrical resistance and optical bandgap decrease from 3 X 10(10) to 5 X 10(6) ohm cm and from 1.3 to 0.6 eV, respectively Simultaneously, the concentration of electrically active point-defect centers in a-C:N:H increases significantly and the reaction in the Fe(CN)(6)(3-/4-) system is facilitated.
引用
收藏
页码:1008 / 1013
页数:6
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