Depolarization artifacts in dual rotating-compensator Mueller matrix ellipsometry

被引：30
|
作者：
Li, Weiqi [1 ]
Zhang, Chuanwei [1 ,2 ]
Jiang, Hao [1 ]
Chen, Xiuguo [1 ]
Liu, Shiyuan [1 ,2 ]
机构：
[1] Huazhong Univ Sci & Technol, State Key Lab Digital Mfg Equipment & Technol, Wuhan 430074, Peoples R China
[2] Wuhan Eopt Technol Co Ltd, Wuhan 430075, Peoples R China
来源：
JOURNAL OF OPTICS | 2016年 / 18卷 / 05期
基金：
中国国家自然科学基金;
关键词：
depolarization; dual rotating-compensator; Mueller matrix ellipsometry; finite bandwidth; correction; measurement accuracy; CALIBRATION; POLARIMETRY; ERRORS;
D O I：
10.1088/2040-8978/18/5/055701
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Noticeable depolarization effects are observed in the measurement of the air using an in-house developed dual rotating-compensator Mueller matrix ellipsometer. We demonstrate that these depolarization effects are essentially artifacts and mainly induced when the compensator with wavelength-dependent optical properties is integrated with the finite bandwidth detector. We define a general formula to represent the actual Mueller matrix of the compensator by taking into account the depolarization artifacts. After incorporating this formula into the system model, a correction method is further proposed, and consequently, improved accuracy can be achieved in the Mueller matrix measurement.
引用
收藏
页数：7
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