High performance NEMS devices for sensing applications

被引：0

作者：

Ernst, Thomas ^{[1
]}

Hentz, Sebastien ^{[1
]}

Arcamone, Julien ^{[1
]}

Agache, Vincent ^{[1
]}

Duraffourg, Laurent ^{[1
]}

Ouerghi, Issam ^{[1
]}

Ludurczak, Willy ^{[1
]}

Ladner, Carine ^{[1
]}

Ollier, Eric ^{[1
]}

Andreucci, Philippe ^{[2
]}

Colinet, Eric ^{[2
]}

Puget, Pierre ^{[2
]}

机构：

[1] CEA LETI MINATEC Campus, 17 Rue Martyrs, Grenoble, France

[2] APIX Analyt, Grenoble, France

来源：

ESSDERC 2015 PROCEEDINGS OF THE 45TH EUROPEAN SOLID-STATE DEVICE RESEARCH CONFERENCE | 2015年

关键词：

nano-electromechanical system (NEMS); gas sensor; mass spectrometry; nanowires; biosensors; 3D integration; MASS-SPECTROMETRY; NANOPARTICLES;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

NEMS based sensors open several opportunities for integrated solutions in emerging domains as chemical analysis and life science. With critical dimensions ranging between 10 and 100 nm, those devices can be made at the VLSI scale, possibly co-integrated with CMOS and are well suited for autonomous, highly sensitive or dense sensors. Several applications will be presented, as complex gas portable recognitions systems, mass spectrometry, or hio-sensors.

引用

页码：31 / 35

页数：5

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