Transparent water-repellent films containing fluoro-alkyl functions by RF plasma-enhanced CVD

被引：4

作者：

Hozumi, A ^{[1
]}

Sekoguchi, H ^{[1
]}

Sugimoto, N ^{[1
]}

Takai, O ^{[1
]}

机构：

[1] Nagoya Univ, Dept Mat Proc Engn, Chikusa Ku, Nagoya, Aichi 46401, Japan

来源：

TRANSACTIONS OF THE INSTITUTE OF METAL FINISHING | 1998年 / 76卷

关键词：

D O I：

10.1080/00202967.1998.11871194

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

Transparent water-repellent films containing fluoro-alkyl functions were prepared on polycarbonate, glass and Si substrates by rf plasma-enhanced CVD. The vapours of the fluoro-alkyl silanes were used as raw materials. The substrate temperature during deposition was around 50 degrees C. The films obtained had good water repellency. The maximum contact angle for a water drop was 107 degrees. The contact angles obtained depended on the number of -(CF2)- in FAS molecules. FTIR and XPS were used to investigate the film properties. The existence of the fluoro-alkyl functions CF3-, -CF2- and > CF-was confirmed at the film surfaces. The transmittance of the PC substrate was improved by the coating. These films also have a function as anti-reflective coatings.

引用

页码：51 / 53

页数：3

共 30 条

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