Fabrication of micro-mold for glass embossing using focused ion beam, femto-second laser, eximer laser and dicing techniques

Various nano-/micro-structuring methods, including focused ion beam (FIB), femto-second laser, KrF eximer laser and dicing techniques, were used to fabricate glassy carbon (GC) micro-molds and were characterized in terms of the process rate, the roughness and the shape of machined structure. The combination of femto-second laser ablation with subsequent FIB milling provided a possibility for the rapid fabrication of high quality micro-structures on a wide surface area. Obtained molds were applied to the hot: emboss process of glasses to investigate process conditions needed for the replication of structures with various geometries and dimensions. (c) 2006 Elsevier B.V. All rights reserved.