Fabrication of shape memory alloy based micro robot by using focused ion beam milling process and actuation using ultraviolet laser

被引：0
|
作者：
Kim, Min-Soo [1 ]
Lee, Hyun-Taek [1 ]
Lee, Kang-In [1 ]
Ahn, Sung-Hoon [1 ,2 ]
机构：
[1] Seoul Natl Univ, Dept Mech & Aerosp Engn, 1 Gwan Ak Ro, Seoul 08826, South Korea
[2] Seoul Natl Univ, Inst Adv Machines & Design, 1 Gwan Ak ro, Seoul 08826, South Korea
来源：
NANOENGINEERING: FABRICATION, PROPERTIES, OPTICS, AND DEVICES XV | 2018年 / 10730卷
基金：
新加坡国家研究基金会;
关键词：
Micro robot; focused ion beam; ultraviolet laser; shape memory alloy; photothermal effect; vibrating microactuator; drug delivery;
D O I：
10.1117/12.2320943
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Great potential in medical applications makes that micro robot has been researched by several research groups. In this research, we demonstrates shape memory alloy (SMA) based micro robot. SMA wire, which has 25 mu m of diameter, is cut and patterned by focused ion beam milling to fabricate shape of robot. The robot consists of diamond-shaped structures contracted and relaxed by two-way shape memory effect, and cuboid features that contact to ground. The robot is powered by ultraviolet laser and actuated using photothermal effect. It can move forward with speed of 2.5 mu m/s. We anticipate that the SMA usage in micro robot can expand flexibility of material selection and enhance its functionality.
引用
收藏
页数：5
相关论文
共 50 条
  • [1] IN SITU ACTUATION OF SHAPE MEMORY ALLOY USING FOCUSED ULTRASOUND
    Chipana, Aldo
    Hill, Jeffrey R.
    Dillon, Christopher R.
    PROCEEDINGS OF ASME 2023 CONFERENCE ON SMART MATERIALS, ADAPTIVE STRUCTURES AND INTELLIGENT SYSTEMS, SMASIS2023, 2023,
  • [2] On the fabrication of NiTi shape memory alloy micro devices using laser
    Huang, WM
    He, Q
    Hong, MH
    Xie, Q
    Fu, YQ
    Du, HJ
    LASERS IN MATERIAL PROCESSING AND MANUFACTURING, 2002, 4915 : 234 - 240
  • [3] Fabrication and modeling of microchannel milling using focused ion beam
    Tseng, A. A.
    Leeladharan, B.
    Li, B.
    Insua, I.
    Chen, C. D.
    INTERNATIONAL JOURNAL OF NANOSCIENCE, VOL 2, NOS 4 AND 5, 2003, 2 (4-5): : 375 - 379
  • [4] Locomotive mechanism design and fabrication of biomimetic micro robot using shape memory alloy
    Lee, YP
    Kim, BK
    Lee, MG
    Park, JO
    2004 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION, VOLS 1- 5, PROCEEDINGS, 2004, : 5007 - 5012
  • [5] FABRICATION OF BISMUTH NANOWIRE DEVICES USING FOCUSED ION BEAM MILLING
    Cheng, H. H.
    Alkaisi, M. M.
    Wu, S. E.
    Liu, C. P.
    ADVANCED MATERIALS AND NANOTECHNOLOGY, PROCEEDINGS, 2009, 1151 : 48 - +
  • [6] Actuation of a carbon/epoxy beam using shape memory alloy wires
    Damansabz, Reza
    Taheri-Behrooz, Fathollah
    JOURNAL OF INTELLIGENT MATERIAL SYSTEMS AND STRUCTURES, 2019, 30 (02) : 186 - 197
  • [7] Fabrication of micro DOE using micro tools shaped with focused ion beam
    Xu, Z. W.
    Fang, F. Z.
    Zhang, S. J.
    Zhang, X. D.
    Hu, X. T.
    Fu, Y. Q.
    Li, L.
    OPTICS EXPRESS, 2010, 18 (08): : 8025 - 8032
  • [8] Controlled fabrication of nickel perpendicular nanocontacts using focused ion beam milling
    Wei, Hong-Xiang
    Langford, R. M.
    Han, Xiufeng
    Coey, J. M. D.
    JOURNAL OF APPLIED PHYSICS, 2006, 99 (08)
  • [9] Investigation on Laser Assisted Actuation of Shape memory alloy based Micro-valve
    Nath, Tameshwer
    Raut, Gaurav
    Kumar, Alok
    Khatri, Ritesh
    Palani, I. A.
    2015 INTERNATIONAL CONFERENCE ON ROBOTICS, AUTOMATION, CONTROL AND EMBEDDED SYSTEMS (RACE), 2015,
  • [10] Micro-fabrication of Biodegradable Polymers using Focused Ion Beam
    Okubo, Satoshi
    Takahashi, Tomohiro
    Takasawa, Yuya
    Gowa, Tomoko
    Sasaki, Takashi
    Nagasawa, Naotsugu
    Tamada, Masao
    Oshima, Akihiro
    Tagawa, Seiichi
    Washio, Masakazu
    JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, 2010, 23 (03) : 393 - 397
12345