Fabrication of shape memory alloy based micro robot by using focused ion beam milling process and actuation using ultraviolet laser

被引：0
|
作者：
Kim, Min-Soo [1 ]
Lee, Hyun-Taek [1 ]
Lee, Kang-In [1 ]
Ahn, Sung-Hoon [1 ,2 ]
机构：
[1] Seoul Natl Univ, Dept Mech & Aerosp Engn, 1 Gwan Ak Ro, Seoul 08826, South Korea
[2] Seoul Natl Univ, Inst Adv Machines & Design, 1 Gwan Ak ro, Seoul 08826, South Korea
来源：
NANOENGINEERING: FABRICATION, PROPERTIES, OPTICS, AND DEVICES XV | 2018年 / 10730卷
基金：
新加坡国家研究基金会;
关键词：
Micro robot; focused ion beam; ultraviolet laser; shape memory alloy; photothermal effect; vibrating microactuator; drug delivery;
D O I：
10.1117/12.2320943
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Great potential in medical applications makes that micro robot has been researched by several research groups. In this research, we demonstrates shape memory alloy (SMA) based micro robot. SMA wire, which has 25 mu m of diameter, is cut and patterned by focused ion beam milling to fabricate shape of robot. The robot consists of diamond-shaped structures contracted and relaxed by two-way shape memory effect, and cuboid features that contact to ground. The robot is powered by ultraviolet laser and actuated using photothermal effect. It can move forward with speed of 2.5 mu m/s. We anticipate that the SMA usage in micro robot can expand flexibility of material selection and enhance its functionality.
引用
收藏
页数：5
相关论文
共 50 条
  • [21] Kinematics of micro bending robot using shape memory alloy for active catheter
    Fu, Yili
    Li, Xianling
    Liu, Hao
    Liang, Zhaoguang
    Ma, Xin
    2006 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND BIOMIMETICS, VOLS 1-3, 2006, : 1594 - +
  • [22] Fabrication of silicon micro-mould for polymer replication using focused ion beam
    Kim, C. S.
    Park, J.
    Chu, W. S.
    Jang, D. Y.
    Kim, S. D.
    Ahn, S. H.
    MICROELECTRONIC ENGINEERING, 2009, 86 (4-6) : 556 - 560
  • [23] Wedge emitter fabrication using focused ion beam
    Ochiai, C
    Sawada, A
    Noriyasu, H
    Takai, M
    Hosono, A
    Okuda, S
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (03): : 904 - 906
  • [24] Examination of fracture surfaces using focused ion beam milling
    Cairney, JM
    Munroe, PR
    Schneibel, JH
    SCRIPTA MATERIALIA, 2000, 42 (05) : 473 - 478
  • [25] Shaping Organic Microcrystals Using Focused Ion Beam Milling
    Li, Wangxiang
    van Baren, Jeremiah
    Berges, Adam
    Bekyarova, Elena
    Lui, Chun Hung
    Bardeen, Christopher J.
    CRYSTAL GROWTH & DESIGN, 2020, 20 (03) : 1583 - 1589
  • [26] Nanometer scale patterning using focused ion beam milling
    Petit, D
    Faulkner, CC
    Johnstone, S
    Wood, D
    Cowburn, RP
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2005, 76 (02): : 026105 - 1
  • [27] High speed micro-fabrication using inductively coupled plasma ion source based focused ion beam system
    Menon, Ranjini
    Nabhiraj, P. Y.
    VACUUM, 2015, 111 : 166 - 169
  • [28] A study on fabrication of silicon mold for polymer hot-embossing using focused ion beam milling
    Youn, Sung-Won
    Okuyama, Chieko
    Takahashi, Masaharu
    Maeda, Ryutaro
    JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2008, 201 (1-3) : 548 - 553
  • [29] Fabrication of Sub-5 nm Nanochannels in Insulating Substrates Using Focused Ion Beam Milling
    Menard, Laurent D.
    Ramsey, J. Michael
    NANO LETTERS, 2011, 11 (02) : 512 - 517
  • [30] Development of the earthworm robot using a shape memory alloy
    Saito, Tomoyuki
    Kagiwada, Tadao
    Harada, Hiroyuki
    Kawamura, Yusuke
    TOWARDS SYNTHESIS OF MICRO - /NANO - SYSTEMS, 2007, (05): : 331 - +
12345