Hydrofluoric acid recovery from waste semiconductor acid solution by ion exchange

被引:6
|
作者
Lin, SH [1 ]
Liu, JM [1 ]
机构
[1] Yuan Ze Univ, Dept Chem Engn, Chungli 320, Taiwan
关键词
acids; ion exchange; waste treatment; recycling; electronic equipment;
D O I
10.1061/(ASCE)0733-9372(2003)129:5(472)
中图分类号
X [环境科学、安全科学];
学科分类号
08 ; 0830 ;
摘要
Recovery of hydrofluoric acid (HF) from waste semiconductor acid solution by ion exchange was investigated. Strong base anionic and strong acid cationic ion exchange resins were involved in the recovery process. The former was used to capture the fluoride in the waste acid solution while the latter was employed for exchanging hydrogen ion for sodium in the NaF solution resulting from regeneration of the anion exchanger with NaOH. The ion exchange process consisted of two ion exchange steps and two regeneration steps. Batch experiments were conducted to determine the equilibrium ion exchange capacities and to develop ion exchange isotherrns. Column tests were made to examine the performances of continuous ion exchange operations under conditions of different feed flow rates and inlet acid concentrations. A simplified model based on the general logistic function was adopted and tested for describing the solute breakthrough behaviors of the exit aqueous solution. Regeneration of exhausted ion exchange resins was also examined to test their effectiveness for repeated use. The hydrofluoric acid recovered by the ion exchange process would be available for reuse. It could also be converted by calcium chloride to high-purity calcium fluoride.
引用
收藏
页码:472 / 478
页数:7
相关论文
共 50 条
  • [31] HYDROMETALLURGICAL RECOVERY OF URANIUM AND MOLYBDENUM FROM AN ACID CARBONATE INSITE SOLUTION BY CONTINUOUS COUNTERCURRENT ION-EXCHANGE
    HENDERSON, WC
    DIXSON, DL
    JOURNAL OF METALS, 1980, 32 (12): : 10 - 10
  • [32] EXTRACTION OF ITACONIC ACID FROM AQUEOUS SOLUTION BY ION EXCHANGE METHOD
    TSAO, JCY
    HUANG, TC
    JOURNAL OF THE CHINESE CHEMICAL SOCIETY, 1962, 9 (04) : 290 - &
  • [33] A UNIQUE ION-EXCHANGE PROCESS FOR THE RECOVERY OF VANADIUM FROM ACID LEACH LIQUORS FROM ORES, CATALYSTS OR WASTE PRODUCTS
    MCLEAN, DC
    JOURNAL OF METALS, 1987, 39 (10): : A93 - A93
  • [34] Ion exchange for product recovery in lactic acid fermentation
    Department of Chemical Engineering, Indian Institute Technology - Bombay, Powai, Bombay 400 076, India
    Sep Sci Technol, 7 (1273-1294):
  • [35] Ion exchange for product recovery in lactic acid fermentation
    Dave, SM
    Patil, SS
    Suresh, AK
    SEPARATION SCIENCE AND TECHNOLOGY, 1997, 32 (07) : 1273 - 1294
  • [36] Ion exchange equilibria and stoichiometry of complexes of element 104 and hafnium in hydrofluoric acid solutions
    Pfrepper, G
    Pfrepper, R
    Krauss, D
    Yakushev, AB
    Timokhin, SN
    Zvara, I
    RADIOCHIMICA ACTA, 1998, 80 (01) : 7 - 12
  • [37] Recovery of nitric acid from waste etching solution using solvent extraction
    Shin, Chang-Hoon
    Kim, Ju-Yup
    Kim, Jun-Young
    Kim, Hyun-Sang
    Lee, Hyang-Sook
    Mohapatra, Debasish
    Ahn, Jae-Woo
    Ahn, Jong-Gwan
    Bae, Wookeun
    JOURNAL OF HAZARDOUS MATERIALS, 2009, 163 (2-3) : 729 - 734
  • [38] REACTION OF GLASSES WITH HYDROFLUORIC-ACID SOLUTION
    TSO, ST
    PASK, JA
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1982, 65 (07) : 360 - 362
  • [39] Acid recovery from waste sulfuric acid by diffusion dialysis
    Guiqing Zhang
    Qixiu Zhang
    Kanggen Zhou
    Journal of Central South University of Technology, 1999, 6 (2): : 103 - 106
  • [40] ACID RECOVERY FROM WASTE SULFURIC ACID BY DIFFUSION DIALYSIS
    Zhang Guiqing Zhang Qixiu Zhou Kanggen (Department of Metallurgical Science and Engineering
    Journal of Central South University, 1999, (02) : 103 - 106