All-metal sealing elements for high-vacuum components

Development of high-vacuum technology in many areas of science and engineering requires vacuum equipment to be simpler in service and to take less expense for manufacture. A sealing element of a new design for high-vacuum equipment and brief results of tests of specimens of vacuum valves are presented in this article. A vacuum valve consists of a sealing unit in the form of a cassette and of a drive mechanism located in the atmosphere. Its advantages are lower expenses of manufacturing, low requirements of precision of manufacturing, and possible restoration of the sealing plate. (C) 2000 Elsevier Science B.V. All rights reserved.