Controllable crystallization and enhanced amorphous stability of Sb-Te films modified by Ag-doping

被引:1
|
作者
Zhong, Juechen [1 ,2 ]
Luo, Yang [1 ,2 ]
Gu, Ting [1 ,2 ]
Wang, Zhenglai [1 ,2 ]
Jiang, Kefeng [1 ,2 ]
Wang, Guoxiang [1 ,2 ]
Lu, Yegang [1 ,2 ]
机构
[1] Ningbo Univ, Adv Technol Res Inst, Lab Infrared Mat & Devices, Ningbo 315211, Zhejiang, Peoples R China
[2] Key Lab Photoelect Detect Mat & Devices Zhejiang, Ningbo 315211, Zhejiang, Peoples R China
来源
MATERIALS RESEARCH EXPRESS | 2016年 / 3卷 / 10期
基金
中国国家自然科学基金;
关键词
thin films; crystal structure; thermal properties; electrical properties; DOPED GE2SB2TE5; PHASE;
D O I
10.1088/2053-1591/3/10/106409
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Ag-doped Sb-Te films were deposited by magnetron co-sputtering and the structure, electrical, optical and thermal properties were analyzed. The results show that Ag-doping restrains crystal grain size, and changes a preferred orientation of the crystalline phase. The crystallization temperature is increased due to the Ag addition. Both amorphous resistance and crystalline resistance are enhanced and the resistance ratio reaches similar to 10(4). Compared with Ge2Sb2Te5, Ag-26.82(Sb3Te)(73.18) film exhibits a better amorphous thermal stability, a higher crystallization temperature (similar to 166 degrees C), a wider optical band gap (0.515 eV), a larger crystallization activation energy (3.17 eV) as well as a better 10 years data retention at 92 degrees C.
引用
收藏
页数:8
相关论文
共 50 条
  • [1] Effect of Ag or Cu doping on erasable phase-change Sb-Te thin films
    Chen, YM
    Kuo, PC
    IEEE TRANSACTIONS ON MAGNETICS, 1998, 34 (02) : 432 - 434
  • [2] CRYSTALLIZATION PROCESS OF SB-TE ALLOY-FILMS FOR OPTICAL STORAGE
    FUJIMORI, S
    YAGI, S
    YAMAZAKI, H
    FUNAKOSHI, N
    JOURNAL OF APPLIED PHYSICS, 1988, 64 (03) : 1000 - 1004
  • [3] Influence of the additive Ag for crystallization of amorphous Ge-Sb-Te thin films
    Song, Ki-Ho
    Kim, Sung-Won
    Seo, Jae-Hee
    Lee, Hyun-Yong
    THIN SOLID FILMS, 2009, 517 (14) : 3958 - 3962
  • [4] ELLIPSOMETRIC INVESTIGATION OF AG-DOPING PROFILES IN AMORPHOUS-CHALCOGENIDE THIN-FILMS
    HONIG, V
    FEDOROV, V
    LIEBMANN, G
    SUPTITZ, P
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1986, 96 (02): : 611 - 619
  • [5] Crystallization process and amorphous state stability of Si-Sb-Te films for phase change memory
    Feng, J.
    Zhang, Z. F.
    Zhang, Y.
    Cai, B. C.
    Lin, Y. Y.
    Tang, T. A.
    Chen, Bomy
    JOURNAL OF APPLIED PHYSICS, 2007, 101 (07)
  • [6] THE MECHANISM OF AG-DOPING OF AMORPHOUS AS2S3 FILMS GREATER-THAN
    CHEN, JT
    LAUKS, IR
    ZEMEL, JN
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (08) : C372 - C372
  • [7] Evaluation of first crystallization in amorphous Ag-added Ag 5.5In6.5Sb59Te29 thin films
    Song, Ki-Ho
    Seo, Jae-Hee
    Kim, Jun-Hyong
    Lee, Hyun-Yong
    Journal of Applied Physics, 2009, 106 (12):
  • [8] Evaluation of first crystallization in amorphous Ag-added Ag5.5In6.5Sb59Te29 thin films
    Song, Ki-Ho
    Seo, Jae-Hee
    Kim, Jun-Hyong
    Lee, Hyun-Yong
    JOURNAL OF APPLIED PHYSICS, 2009, 106 (12)
  • [9] Uniform Sb doping of ZnO films with controllable morphology and enhanced optical property
    Qi, Lin
    Song, Zhenzhu
    Yu, Shifeng
    Qi, Yujie
    Yu, Hui
    Zhang, He
    Jin, Xiaoshi
    Qi, Yang
    Li, Xin
    Vacuum, 2024, 229
  • [10] The Roles of the Ge-Te Core Network and the Sb-Te Pseudo Network During Rapid Nucleation-Dominated Crystallization of Amorphous Ge2Sb2Te5
    Ohara, Koji
    Temleitner, Laszlo
    Sugimoto, Kunihisa
    Kohara, Shinji
    Matsunaga, Toshiyuki
    Pusztai, Laszlo
    Itou, Masayoshi
    Ohsumi, Hiroyuki
    Kojima, Rie
    Yamada, Noboru
    Usuki, Takeshi
    Fujiwara, Akihiko
    Takata, Masaki
    ADVANCED FUNCTIONAL MATERIALS, 2012, 22 (11) : 2251 - 2257