Adaptive control for the conventional mode of operation of MEMS gyroscopes

被引：114
|
作者：
Park, SS [1 ]
Horowitz, R
机构：
[1] Univ Calif Berkeley, PATH, Berkeley, CA 94720 USA
[2] Univ Calif Berkeley, Dept Mech Engn, Richmond, CA 94804 USA
来源：
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2003年 / 12卷 / 01期
关键词：
adaptive control; averaging analysis; force-balancing control; gyroscope; MEMS;
D O I：
10.1109/JMEMS.2002.807468
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents adaptive add-on control algorithms for the conventional mode of operation of MEMS z-axis gyroscopes. This scheme is realized by adding an outer loop to a conventional force-balancing scheme that includes a parameter estimation algorithm. The parameter adaptation algorithm estimates the angular rate, identifies and compensates the quadrature error, and may permit on-line automatic mode tuning. The convergence and resolution analysis show that the proposed adaptive add-on control scheme prevents the angular rate estimate from being contaminated by the quadrature error, while keeping ideal resolution performance of a conventional force-balancing scheme.
引用
收藏
页码：101 / 108
页数：8
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