Surface states of hydrogen-terminated Si(111) by metastable atom electron spectroscopy and angle-resolved ultraviolet photoelectron spectroscopy

The surface electronic states of hydrogen-terminated Si(111) [H-Si(111)-(1 x 1)] were studied by metastable atom electron spectroscopy (MAES) and angle-resolved ultraviolet photoelectron spectroscopy (ARUPS), coupled with an intensity analysis used for organic systems. The surface states of H-Si(111)-(1 x 1) originated from Si-H bonds were selectively observed by MAES which can excite electrons distributed at the outermost surface. Furthermore, the prominent ARUPS peak with very small dispersion at around 10eV binding energy from the vacuum level was confirmed to originate from a nondispersive Si-H sigma state by quantitative analysis of the photoelectron angular distribution using a simple computation model used for organic thin films.