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- [31] Surface reaction probabilities and kinetics of H, SiH3, Si2H5, CH3, and C2H5 during deposition of a-Si:H and a-C:H from H2, SiH4, and CH4 discharges Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1998, 16 (01):
- [33] Surface reaction probabilities and kinetics of H, SiH3, Si2H5, CH3, and C2H5 during deposition of a-Si:H and a-C:H from H2, SiH4, and CH2 discharges JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1998, 16 (01): : 278 - 289
- [36] MONTE-CARLO TRANSITION-STATE THEORY - CH-4-]CH-3+H, SIH-4-]SIH-3+H JOURNAL OF CHEMICAL PHYSICS, 1984, 81 (02): : 828 - 832