Transmission and reflection mode scanning microwave microscopy (SMM): experiments, calibration, and simulations

被引：0

作者：

Medina, Pablo F. ^{[1
]}

Lucibello, Andrea ^{[2
]}

Gramse, Georg ^{[3
]}

Brinciotti, Enrico ^{[1
]}

Kasper, Manuel ^{[3
]}

Oladipo, A. O. ^{[4
,5
]}

Feger, Reinhard ^{[6
]}

Stelzer, Andreas ^{[6
]}

Tanbakuchi, Hassan ^{[7
]}

Stancliff, Roger ^{[7
]}

Proietti, Emanuela ^{[2
]}

Marcelli, Romolo ^{[2
]}

Kienberger, Ferry ^{[1
]}

机构：

[1] Keysight Technol Austria, Keysight Labs, Gruberstr 40, A-4020 Linz, Austria

[2] CNR, Inst Microelect & Microsyst, I-00133 Rome, Italy

[3] JKU, Inst Biophys, A-4020 Linz, Austria

[4] Bionano Consulting, London N1C 4AG, England

[5] UCL, Elect & Elect Engn Dept, London WC1E 7JE, England

[6] JKU, Inst Commun Engn & RF Syst, A-4040 Linz, Austria

[7] Keysight Technol, Santa Rosa, CA 95403 USA

来源：

2015 45TH EUROPEAN MICROWAVE CONFERENCE (EUMC) | 2015年

关键词：

scanning microwave microscopy; transmission; nanoscale; microwave;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Reflection mode scanning microwave microscopy (SMM) is compared to a newly developed transmission mode imaging hardware for extended scattering S11 and S12 measurements. Transmission mode imaging is realized by an SMA connector placed below the sample to excite an electromagnetic wave towards the cantilever acting as nanoscale-sized receiver structure. The frequency response was investigated between 1-20 GHz and a circuitry model of the SMM matching network was combined with a 3D finite element model of the tip-sample system. Modeling results include the local 3D electric field distribution around the nanoscale cantilever tip in contact to the sample. Reflection mode measurements were calibrated using a simple three error-parameter workflow allowing for quantitative impedance and capacitance imaging. A qualitative agreement was obtained between measurements and SMM models for both S11 and S12.

引用

页码：654 / 657

页数：4

共 50 条

[1] Scanning microdeformation microscopy in reflection mode
Vairac, P
Cretin, B
APPLIED PHYSICS LETTERS, 1996, 68 (04) : 461 - 463
[2] Quantitative Scanning Microwave Microscopy: A calibration flow
Schweinboeck, T.
Hommel, S.
MICROELECTRONICS RELIABILITY, 2014, 54 (9-10) : 2070 - 2074
[3] Scanning Microwave Microscopy for Nanoscale Characterization of Semiconductors: De-embedding reflection contact mode measurements
Michalas, L.
Lucibello, A.
Badino, G.
Joseph, C. H.
Brinciotti, E.
Kienberger, F.
Proietti, E.
Marcelli, R.
2015 45TH EUROPEAN MICROWAVE CONFERENCE (EUMC), 2015, : 159 - 162
[4] A broadband toolbox for scanning microwave microscopy transmission measurements
Lucibello, Andrea
Sardi, Giovanni Maria
Capoccia, Giovanni
Proietti, Emanuela
Marcelli, Romolo
Kasper, Manuel
Gramse, Georg
Kienberger, Ferry
REVIEW OF SCIENTIFIC INSTRUMENTS, 2016, 87 (05):
[5] Characterization of nanoparticles by scanning electron microscopy in transmission mode
Buhr, E.
Senftleben, N.
Klein, T.
Bergmann, D.
Gnieser, D.
Frase, C. G.
Bosse, H.
MEASUREMENT SCIENCE AND TECHNOLOGY, 2009, 20 (08)
[6] Temperature Calibration for In Situ Environmental Transmission Electron Microscopy Experiments
Winterstein, Jonathan P.
Lin, Pin Ann
Sharma, Renu
MICROSCOPY AND MICROANALYSIS, 2015, 21 (06) : 1622 - 1628
[7] Transmission scanning electron microscopy: Defect observations and image simulations
Callahan, Patrick G.
Stinville, Jean-Charles
Yao, Eric R.
Echlin, McLean P.
Titus, Michael S.
De Graef, Marc
Gianola, Daniel S.
Pollock, Tresa M.
ULTRAMICROSCOPY, 2018, 186 : 49 - 61
[8] Applications of the transmission line matrix method to microwave scanning microscopy
Ciocan, R
Ida, N
Ciocan, E
Jiang, HB
APPLIED COMPUTATIONAL ELECTROMAGNETICS SOCIETY JOURNAL, 2004, 19 (1B): : 94 - 100
[9] A substitution method for nanoscale capacitance calibration using scanning microwave microscopy
Moran-Meza, Jose A.
Delvallee, Alexandra
Allal, Djamel
Piquemal, Francois
MEASUREMENT SCIENCE AND TECHNOLOGY, 2020, 31 (07)
[10] Collection mode near-field scanning microwave microscopy
Cortes, R.
Coello, V.
Arriaga, R.
Elizondo, N.
OPTIK, 2014, 125 (10): : 2400 - 2404

← 1 2 3 4 5 →