Characterization and performance of optomechanical uncooled infrared imaging system

被引:14
|
作者
Zhao, Y [1 ]
Choi, JE [1 ]
Horowitz, R [1 ]
Majumdar, A [1 ]
Kitching, J [1 ]
Norton, P [1 ]
机构
[1] Univ Calif Berkeley, Dept Mech Engn, Berkeley, CA 94720 USA
关键词
optomechanical uncooled infrared imaging; focal plane array (FPA); NETD; microcantilever array;
D O I
10.1117/12.450542
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An uncooled infrared (IR) imaging system based on thermomechanical deformation of bi-material cantilever beams combined with optical detection of beam deflection has been developed. The focal plane array (FPA) contains 300 X 300 cantilever sensors, which are optimized to detect IR radiation in the 8-14 mum wavelength range. Noise and response analysis show that the noise-equivalent temperature difference (NETD) of the system is, 200 mK using f/1. IR optics and 10 Hz frame capture rate. The NETD is found to be limited by the shot noise of the visible CCD imager used in the optical readout. Statistical correlation between two repeated tests separated by 10 minutes shows that the response of over 70 percent pixels are repeatable to within 60 percent.
引用
收藏
页码:164 / 174
页数:11
相关论文
共 50 条
  • [1] Optomechanical uncooled infrared imaging system: Design, microfabrication, and performance
    Zhao, Y
    Mao, MY
    Horowitz, R
    Majumdar, A
    Varesi, J
    Norton, P
    Kitching, J
    [J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2002, 11 (02) : 136 - 146
  • [2] Design and control of a thermal stabilizing system for a MEMS optomechanical uncooled infrared imaging camera
    Choi, JE
    Yamaguchi, J
    Morales, S
    Horowitz, R
    Zhao, Y
    Majumdar, A
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 2003, 104 (02) : 132 - 142
  • [3] Optimized optomechanical micro-cantilever array for uncooled infrared Imaging
    Dong Feng-Liang
    Zhang Qing-Chuan
    Chen Da-Peng
    Miao Zheng-Yu
    Xiong Zhi-Ming
    Guo Zhe-Ying
    Li Chao-Bo
    Jiao Bin-Bin
    Wu Xiao-Ping
    [J]. CHINESE PHYSICS LETTERS, 2007, 24 (12) : 3362 - 3364
  • [4] High-speed infrared imaging by an uncooled optomechanical focal plane array
    Feng, Yun
    Zhao, Yuejin
    Dong, Liquan
    Liu, Ming
    Li, Xueyan
    Ma, Wei
    Yu, Xiaomei
    Kong, Lingqin
    Liu, Xiaohua
    [J]. APPLIED OPTICS, 2015, 54 (34) : 10189 - 10195
  • [5] Infrared vision using uncooled optomechanical camera
    Majumdar, A
    Mao, M
    Perazzo, T
    Zhao, Y
    Kwon, O
    Varesi, J
    Norton, P
    [J]. PHOTODETECTORS: MATERIALS AND DEVICES V, 2000, 3948 : 74 - 79
  • [6] Uncooled infrared imaging device based on optimized optomechanical micro-cantilever array
    Dong, Fengliang
    Zhang, Qingchuan
    Chen, Dapeng
    Miao, Zhengyu
    Xiong, Zhiming
    Guo, Zheying
    Li, Chaobo
    Jiao, Binbin
    Wu, Xiaoping
    [J]. ULTRAMICROSCOPY, 2008, 108 (06) : 579 - 588
  • [7] Uncooled IR imaging using optomechanical detectors
    Miao, Zhengyu
    Zhang, Qingchuan
    Chen, Dapeng
    Guo, Zheying
    Dong, Fengliang
    Xiong, Zhiming
    Wu, Xiaoping
    Li, Chaobo
    Jiao, Binbin
    [J]. ULTRAMICROSCOPY, 2007, 107 (08) : 610 - 616
  • [8] Infrared vision using uncooled micro-optomechanical camera
    Perazzo, T
    Mao, M
    Kwon, O
    Majumdar, A
    Varesi, JB
    Norton, P
    [J]. APPLIED PHYSICS LETTERS, 1999, 74 (23) : 3567 - 3569
  • [9] Application of a power stabilized laser to the uncooled infrared imaging system
    Liu, Ming
    Zhao, Yuejin
    Liu, Xiaohua
    Dong, Liquan
    Teng, Fei
    [J]. INFRARED SYSTEMS AND PHOTOELECTRONIC TECHNOLOGY III, 2008, 7055
  • [10] An optical readout method based uncooled infrared imaging system
    Jiao, Binbin
    Li, Chaobo
    Chen, Dapeng
    Ye, Tianchun
    Ou, Yi
    Dong, Lijun
    Zhang, Qingchuan
    Guo, Zheying
    Dong, Fengliang
    [J]. INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES, 2008, 29 (03): : 261 - 271