Optimized optomechanical micro-cantilever array for uncooled infrared Imaging

被引：0

作者：

Dong Feng-Liang ^{[1
]}

Zhang Qing-Chuan ^{[1
]}

Chen Da-Peng ^{[2
]}

Miao Zheng-Yu ^{[1
]}

Xiong Zhi-Ming ^{[1
]}

Guo Zhe-Ying ^{[1
]}

Li Chao-Bo ^{[1
]}

Jiao Bin-Bin ^{[1
]}

Wu Xiao-Ping ^{[1
]}

机构：

[1] Univ Sci & Technol China, Key Lab Mech Behavior & Design Mat, Hefei 230027, Peoples R China

[2] Chinese Acad Sci, Microelect R&D Ctr, Beijing, Peoples R China

来源：

CHINESE PHYSICS LETTERS | 2007年 / 24卷 / 12期

关键词：

D O I：

10.1088/0256-307X/24/12/020

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

We present a new substrate-free bimaterial cantilever array made of SiNx and Au for an uncooled micro-optomechanical infrared imaging device. Each cantilever element has an optimized deformation magnification structure. A 160 x 160 array with a 120 mu m x 120 mu m pitch is fabricated and an optical readout is used to collectively measure deflections of all microcantilevers in the array. Thermal images of room-temperature objects with higher spatial resolution have been obtained and the noise-equivalent temperature difference of the fabricated focal plane arrays is given statistically and is measured to be about 270mK.

引用

页码：3362 / 3364

页数：3

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