AlGaN deep ultraviolet LEDs on bulk AIN substrates

被引:29
|
作者
Ren, Zaiyuan
Sun, Q.
Kwon, S. -Y.
Han, J. [1 ]
Davitt, K. [2 ]
Song, Y. K. [2 ]
Nurmikko, A. V. [2 ]
Liu, W.
Smart, J. [3 ]
Schowalter, L. [3 ]
机构
[1] Yale Univ, Dept Elect Engn, 15 Prospect St, New Haven, CT 06520 USA
[2] Brown Univ, Div Engn, Providence, RI 01219 USA
[3] Crystal IS Inc, Green Island 12183, NY USA
关键词
D O I
10.1002/pssc.200674758
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
We report the growth of sub-300 nm ultraviolet light emitting diodes (UV LEDs) on bulk AlN substrates. Heteroepitaxial evolution study through interrupted growth experiments revealed that AlxGa1-xN (x > 0.5) epilayers can be grown pseudomorphically with well-defined step-flow growth mode below a certain critical thickness. The build-up of compressive strain energy eventually induces a morphological roughening followed by the admission of misfit dislocations. LEDs grown on bulk AlN substrates exhibit noticable improvement over those on sapphire in device impedance, efficiency and thermal characteristics under high-level injection, pointing to a promising substrate platform for high performance III-nitride ultraviolet optoelectronics. (c) 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码:2482 / +
页数:2
相关论文
共 50 条
  • [41] Hundred-meter Gb/s deep ultraviolet wireless communications using AlGaN micro-LEDs
    Maclure, Daniel M.
    Chen, Cheng
    McKendry, Jonathan J. D.
    Xie, Enyuan
    Hill, Jordan
    Herrnsdorf, Johannes
    Gu, Erdan
    Haas, Harald
    Dawson, Martin D.
    OPTICS EXPRESS, 2022, 30 (26): : 46811 - 46821
  • [42] Milliwatt power 233nm AlGaN-based deep UV-LEDs on sapphire substrates
    Lobo-Ploch, Neysha
    Mehnke, Frank
    Sulmoni, Luca
    Cho, Hyun Kyong
    Guttmann, Martin
    Glaab, Johannes
    Hilbrich, Katrin
    Wernicke, Tim
    Einfeldt, Sven
    Kneissl, Michael
    APPLIED PHYSICS LETTERS, 2020, 117 (11)
  • [43] GaN bulk substrates for GaN based LEDs and LDs
    Oda, O
    Inoue, T
    Seki, Y
    Kainosho, K
    Yaegashi, S
    Wakahara, A
    Yoshida, A
    Kurai, S
    Yamada, Y
    Taguchi, T
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2000, 180 (01): : 51 - 58
  • [44] GaN bulk substrates for GaN based LEDs and LDs
    Oda, O.
    Inoue, T.
    Seki, Y.
    Kainosho, K.
    Yaegashi, S.
    Wakahara, A.
    Yoshida, A.
    Kurai, S.
    Yamada, Y.
    Taguchi, T.
    Physica Status Solidi (A) Applied Research, 2000, 180 (01): : 51 - 58
  • [45] Deep-Ultraviolet LEDs Fabricated by Nanoimprinting
    Horng, Ray-Hua
    Lai, Yan-Chung
    Lai, Liang-Hsing
    ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2019, 9 (01)
  • [46] Deep ultraviolet photoluminescence studies of AIN photonic crystals
    Nepal, N
    Shakya, J
    Nakarmi, ML
    Lin, JY
    Jiang, HX
    APPLIED PHYSICS LETTERS, 2006, 88 (13)
  • [47] 240 nm AlGaN-based deep ultraviolet micro-LEDs: size effect versus edge effect
    Lu, Shunpeng
    Bai, Jiangxiao
    Li, Hongbo
    Jiang, Ke
    Ben, Jianwei
    Zhang, Shanli
    Zhang, Zi-Hui
    Sun, Xiaojuan
    Li, Dabing
    JOURNAL OF SEMICONDUCTORS, 2024, 45 (01)
  • [48] Uneven AlGaN multiple quantum well for deep-ultraviolet LEDs grown on macrosteps and impact on electroluminescence spectral output
    Kaneda, Michiko
    Pernot, Cyril
    Nagasawa, Yosuke
    Hirano, Akira
    Ippommatsu, Masamichi
    Honda, Yoshio
    Amano, Hiroshi
    Akasaki, Isamu
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2017, 56 (06)
  • [49] 240 nm AlGaN-based deep ultraviolet micro-LEDs: size effect versus edge effect
    Shunpeng Lu
    Jiangxiao Bai
    Hongbo Li
    Ke Jiang
    Jianwei Ben
    Shanli Zhang
    Zi-Hui Zhang
    Xiaojuan Sun
    Dabing Li
    Journal of Semiconductors, 2024, 45 (01) : 66 - 74
  • [50] Joint intelligent optimization design of the active region and electron blocking layer for AlGaN-based deep ultraviolet LEDs
    Wang, Jinglei
    Lu, Huimin
    Ma, Jianhua
    Zhu, Yifan
    Zhang, Zihua
    Yu, Tongjun
    Wei, Xuecheng
    Yang, Hua
    Wang, Jianping
    AIP ADVANCES, 2025, 15 (01)