Floating Gate Memory-based Monolayer MoS2 Transistor with Metal Nanocrystals Embedded in the Gate Dielectrics

被引:109
|
作者
Wang, Jingli [1 ,2 ]
Zou, Xuming [1 ,2 ]
Xiao, Xiangheng [1 ,2 ]
Xu, Lei [1 ,2 ]
Wang, Chunlan [1 ,2 ]
Jiang, Changzhong [1 ,2 ]
Ho, Johnny C. [3 ]
Wang, Ti [1 ,2 ]
Li, Jinchai [1 ,2 ]
Liao, Lei [1 ,2 ]
机构
[1] Wuhan Univ, Dept Phys, Minist Educ, Wuhan 430072, Peoples R China
[2] Wuhan Univ, Minist Educ, Key Lab Artificial Micro & Nanostruct, Wuhan 430072, Peoples R China
[3] City Univ Hong Kong, Dept Phys & Mat Sci, Hong Kong, Hong Kong, Peoples R China
关键词
work functions; MoS2; metallic nanocrystals; floating gates; flash memory; NONVOLATILE MEMORY; GRAPHENE; NANOPARTICLES; TECHNOLOGY; DEVICES; STATES;
D O I
10.1002/smll.201401872
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Charge trapping layers are formed from different metallic nanocrystals in MoS2-based nanocrystal floating gate memory cells in a process compatible with existing fabrication technologies. The memory cells with Au nanocrystals exhibit impressive performance with a large memory window of 10 V, a high program/erase ratio of approximately 105 and a long retention time of 10 years. © 2014 Wiley-VCH Verlag GmbH & Co. KGaA.
引用
收藏
页码:208 / 213
页数:6
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