Physical and dielectric properties of sol-gel derived ZnO-doped Zr0.8Sn0.2TiO4 dielectric thin films

被引:4
|
作者
Hsu, Cheng-Hsing [1 ]
Chung, Ching-Yi [1 ]
机构
[1] Natl United Univ, Dept Elect Engn, Kung Ching Li 36003, Miao Li, Taiwan
关键词
Dielectric properties; Sol-gel method; ZnO-doped Zr0.8Sn0.2TiO4 thin film; ELECTRICAL-PROPERTIES; RESONATOR MATERIALS; MICROSTRUCTURE; TEMPERATURE; (ZR; SN)TIO4; DEPOSITION;
D O I
10.1016/j.jallcom.2009.10.238
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Electrical properties, optical properties and microstructures of 1 wt% ZnO-doped (Zr0.8Sn0.2)TiO4 thin films prepared by the sol-gel method on ITO substrates at different heat-treatment temperatures have been investigated. All films exhibited ZST (111) and (101) orientations perpendicular to the substrate surface and the grain size increased with increasing heat-treatment temperature. Optical transmittance spectroscopy further revealed high transparency (over 80%) in the visible region of the spectrum. At a heat-treatment temperature level of 250 degrees C, the ZnO-doped (Zr0.8Sn0.2)TiO4 films were found to possess a dielectric constant of 18 (at 1 MHz), a dissipation factor of 0.24 (at 1 MHz) and a leakage current density of 8.7 x 10(-9) A/cm(2) at an electrical field of 50 V/cm. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码:483 / 486
页数:4
相关论文
共 50 条
  • [1] Sol-Gel Derived ZnO-Doped Zr0.8Sn0.2TiO4 Thin Films on Indium Tin Oxide/Glass Substrate
    Hsu, Cheng-Hsing
    Chung, Ching-Yi
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2011, 94 (06) : 1837 - 1842
  • [2] Properties of ZnO-doped Zr0.8Sn0.2TiO4 thin films by rf sputtering
    Huang, CL
    Hsu, CS
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 21 (02): : 670 - 676
  • [3] High quality microwave Zr0.8Sn0.2TiO4 dielectric thin film prepared by sol-gel method
    Ho, YS
    Weng, MH
    Wang, SS
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2005, 44 (7A): : 5125 - 5128
  • [4] Nano powder and microwave dielectric properties of sol-gel-derived Zr0.8Sn0.2TiO4 ceramics
    Ho, YS
    Weng, MH
    Dai, BT
    Wang, SS
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2005, 44 (08): : 6152 - 6155
  • [5] Fabrication of ZnO-doped Zr0.8Sn0.2TiO4 thin films by radio frequency magnetron sputtering
    Huang, CL
    Hsu, CS
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2000, 18 (05): : 2327 - 2332
  • [6] Structural and dielectric properties of ZnO-doped (Zr0.8Sn0.2)TiO4 films at radio frequency
    Hsu, CS
    Huang, CL
    INTEGRATED FERROELECTRICS, 2003, 51 : 127 - 136
  • [7] Influence of annealing treatments for ZnO-doped Zr0.8Sn0.2TiO4 thin films by RF magnetron sputtering
    Hsu, Cheng-Hsing
    THIN SOLID FILMS, 2009, 517 (17) : 5061 - 5065
  • [8] Electrical and Optical Properties of ZnO-doped Zr0.8Sn0.2TiO4 Thin Films on ITO/Glass Substrates by RF Magnetron Sputtering
    Hsu, Cheng-Hsing
    Yang, His-Wen
    Lin, Jenn-Sen
    FUNCTIONAL AND ELECTRONIC MATERIALS, 2011, 687 : 70 - +
  • [9] Optical and dielectric properties of (Zr0.8,Sn0.2)TiO4 thin films prepared by sol-gel process
    Cheng, WX
    Ding, AL
    Qiu, PS
    He, XY
    Zheng, XS
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2003, 99 (1-3): : 382 - 385
  • [10] Optical and Dielectric Properties and Microstructures of rf-Magnetron Sputtered ZnO-Doped Zr0.8Sn0.2TiO4 Films on Indium Tin Oxide/Glass Substrates
    Hsu, Cheng-Hsing
    JOURNAL OF ELECTRONIC MATERIALS, 2011, 40 (10) : 2159 - 2165