Atomic precision imaging with an on-chip scanning tunneling microscope integrated into a commercial ultrahigh vacuum STM system

被引：3

作者：

Alipour, Afshin ^{[1
]}

Moheimani, S. O. Reza ^{[1
]}

Owen, James H. G. ^{[2
]}

Fuchs, Ehud ^{[2
]}

Randall, John N. ^{[2
]}

机构：

[1] Univ Texas Dallas, Erik Jonsson Sch Engn & Comp Sci, Richardson, TX 75080 USA

[2] Zyvex Labs LLC, 1301 N Plano Rd, Richardson, TX 75081 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2021年 / 39卷 / 04期

关键词：

Degrees of freedom (mechanics) - Electromechanical devices - Microscopes - Hybrid systems - MEMS;

D O I：

10.1116/6.0001107

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this article, we replace the Z axis of the piezotube of a conventional Ultrahigh-Vacuum (UHV) Scanning Tunneling Microscope (STM) with a one-degree-of-freedom Microelectromechanical-System (MEMS) nanopositioner. As a result, a hybrid system is realized in which motions in the XY plane are carried out by the piezotube, while the MEMS device performs the Z-axis positioning with a smaller footprint and higher sensitivity. With the proposed system and a feedback loop, STM imaging is conducted on an H-passivated Si (100)-2 x1 sample in a UHV condition, demonstrating that this on-chip STM is conducive to atomic precision scanning tunneling microscopy. Published under an exclusive license by the AVS.

引用

页数：5

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