Compact amorphous-silicon visible-light monitor integrated in silicon nitride waveguides

被引：0
|
作者：
De Vita, Christian [1 ]
Klitis, Charalambos [2 ]
Codreanu, Nina [1 ,3 ,4 ]
Ferrari, Giorgio [1 ]
Sorel, Marc [2 ]
Melloni, Andrea [1 ]
Morichetti, Francesco [1 ]
机构：
[1] Politecn Milan, Dept Elect, Informat & Bioengn DEIB, I-20133 Milan, Italy
[2] Univ Glasgow, Rankine Bldg,Oakfield Ave, Glasgow G12 8LT, Scotland
[3] Delft Univ Technol, Dept Quantum Nanosci, QuTech, Delft, Netherlands
[4] Delft Univ Technol, Kavli Inst Nanosci, Delft, Netherlands
来源：
2021 IEEE 17TH INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS (GFP 2021) | 2021年
关键词：
optical waveguides; amorphous silicon; integrated detectors; visible light; photonic integrated circuits;
D O I：
10.1109/GFP51802.2021.9673949
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This work reports on the realization of an amorphous silicon visible-light detector integrated in Si3N4 waveguides. The device is very compact (< 40 mu m), has a responsivity of about 10 mA/W and a sensitivity of -40 dBm.
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页数：2
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