Torsion pendulum method to evaluate the internal friction and elastic modulus of films

被引：12
|
作者：
Li, ZS [1 ]
Fang, QF
Veprek, S
Li, SZ
机构：
[1] Chinese Acad Sci, Inst Solid State Phys, Key Lab Internal Frict & Defects Solids, Hefei 230031, Peoples R China
[2] Tech Univ Munich, Inst Chem Inorgan Mat, D-85747 Munich, Germany
[3] Qingdao Inst Chem & Technol, Qingdao 266042, Peoples R China
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 2003年 / 74卷 / 04期
关键词：
D O I：
10.1063/1.1544079
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The formulas for the evaluation of the internal friction and shear elastic modulus of a film deposited on a cylindrical substrate using the torsion pendulum method are derived in this article. The internal friction and the shear modulus of the film, especially their variation with temperature, can be easily deduced by measuring the internal friction and the resonance frequency of the pendulum with the bare substrate and with the composite, respectively. As an example, the shear modulus and the internal friction of a TiN/Ti(C,N) multilayer film deposited on a Mo wire are measured in the temperature range from room temperature to 400 degreesC. (C) 2003 American Institute of Physics.
引用
收藏
页码：2477 / 2480
页数：4
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