Bias dependent two-channel conduction in InAlN/AlN/GaN structures

被引:15
|
作者
Leach, J. H. [1 ]
Ni, X. [1 ]
Li, X. [1 ]
Wu, M. [1 ]
Ozgur, U. [1 ]
Morkoc, H. [1 ]
Zhou, L. [2 ]
Cullen, D. A. [2 ]
Smith, D. J. [2 ]
Cheng, H. [3 ]
Kurdak, C. [3 ]
Meyer, J. R. [4 ]
Vurgaftman, I. [4 ]
机构
[1] Virginia Commonwealth Univ, Dept Elect & Comp Engn, Richmond, VA 23284 USA
[2] Arizona State Univ, Dept Phys, Tempe, AZ 85287 USA
[3] Univ Michigan, Dept Phys, Ann Arbor, MI 48109 USA
[4] USN, Res Lab, Washington, DC 20375 USA
关键词
MOBILITY;
D O I
10.1063/1.3330627
中图分类号
O59 [应用物理学];
学科分类号
摘要
Due to growth temperature differences during deposition of GaN heterostructures utilizing InAlN barriers, an inadvertent parasitic GaN layer can form in the InAlN barrier layer. In structures utilizing AlN spacer layers, this parasitic layer acts as a second conduction channel with a carrier density dependent upon polarization charges and lattice strain as well as the surface potential. The effect of an additional GaN spacer layer in InAlN/AlN/GaN structures is assessed using simulations, electron-microscopy observations, magnetoconductivity measurements with gated Hall bar samples, and with quantitative mobility spectrum analysis. We propose a possible formation mechanism for the parasitic layer, and note that although the additional unintended layer may have beneficial aspects, we discuss a strategy to prevent its occurrence. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3330627]
引用
收藏
页数:4
相关论文
共 50 条
  • [1] Two-subband conduction in a gated high density InAlN/AlN/GaN heterostructure
    Cheng, H.
    Kurdak, C.
    Leach, J. H.
    Wu, M.
    Morkoc, H.
    APPLIED PHYSICS LETTERS, 2010, 97 (11)
  • [2] Two-channel conduction in YbPtBi
    Schilling, M. B.
    Loehle, A.
    Neubauer, D.
    Shekhar, C.
    Felser, C.
    Dressel, M.
    Pronin, A. V.
    PHYSICAL REVIEW B, 2017, 95 (15)
  • [3] Rigorous channel temperature analysis verified for InAlN/AlN/GaN HEMT
    Florovic, M.
    Szobolovszky, R.
    Kovac, J., Jr.
    Chvala, A.
    Jacquet, J-C
    Delage, S. L.
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2019, 34 (06)
  • [4] The effect of ammonia flow in the AlN spacer on the electrical properties of InAlN/AlN/GaN HEMT structures
    Gamarra, Piero
    Lacam, Cedric
    Magis, Michelle
    Tordjman, Maurice
    Poisson, Marie-Antoinette di Forte
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2012, 209 (01): : 21 - 24
  • [5] Carrier mobility in the channel of AlGaN/(AlN)/GaN and InAlN/(AlN)/GaN heterostructures, limited by different scattering mechanisms: experiment and calculation
    Arteev, D. S.
    Sakharov, A. V.
    Lundin, W. V.
    Zakheim, D. A.
    Zavarin, E. E.
    Tsatsulnikov, A. F.
    INTERNATIONAL CONFERENCE PHYSICA.SPB/2019, 2019, 1400
  • [6] Temperature dependent DC characterization of InAlN/(AlN)/GaN HEMT for improved reliability
    Takhar, K.
    Gomes, U. P.
    Ranjan, K.
    Rathi, S.
    Biswas, D.
    INTERNATIONAL CONFERENCE ON MATERIALS SCIENCE AND TECHNOLOGY (ICMST 2012), 2015, 73
  • [7] Stress test measurements of lattice-matched InAlN/AlN/GaN HFET structures
    Leach, Jacob H.
    Wu, Mo
    Ni, Xianfeng
    Li, Xing
    Ozgur, Umit
    Morkoc, Hadis
    Liberis, Juozas
    Sermuksnis, Emilis
    Matulionis, Arvydas
    Cheng, Hailing
    Kurdale, Cagliyan
    Moon, Yong-Tae
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2010, 207 (06): : 1345 - 1347
  • [8] N-face GaN/AlN/GaN/InAlN and GaN/AlN/AlGaN/GaN/InAlN high-electron-mobility transistor structures grown by plasma-assisted molecular beam epitaxy on vicinal substrates
    Ahmadi, Elaheh
    Wu, Feng
    Li, Haoran
    Kaun, Stephen W.
    Tahhan, Maher
    Hestroffer, Karine
    Keller, Stacia
    Speck, James S.
    Mishra, Umesh K.
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2015, 30 (05) : 1 - 8
  • [9] Charge Density Dependent Two-Channel Conduction in Organic Electric Double Layer Transistors ( EDLTs)
    Xie, Wei
    Liu, Feilong
    Shi, Sha
    Ruden, P. Paul
    Frisbie, C. Daniel
    ADVANCED MATERIALS, 2014, 26 (16) : 2527 - 2532
  • [10] Optical Characterization of InAlN/AlN/InGaN/GaN/Sapphire High Electron Mobility Transistor Structures
    Taya, Payal
    Singh, V. K.
    Jana, Dipankar
    Tyagi, Renu
    Sharma, T. K.
    DAE SOLID STATE PHYSICS SYMPOSIUM 2018, 2019, 2115