Nanometrology by x-ray interferometry

被引：1
|
作者：
Chetwynd, DG [1 ]
机构：
[1] Univ Warwick, Dept Engn, Ctr Nanotechnol & Microengn, Coventry CV4 7AL, W Midlands, England
来源：
MEASUREMENT & CONTROL | 1998年 / 31卷 / 02期
关键词：
D O I：
10.1177/002029409803100203
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
[No abstract available]
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页码：43 / 47
页数：5
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