Chemical vapor deposition of transition metal nitrides, sulfides and phosphides.

被引：0
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作者：
Hoffman, DM [1 ]
机构：
[1] UNIV HOUSTON,DEPT CHEM,HOUSTON,TX 77204
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1996年 / 211卷
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
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页码：2 / INOR
页数：1
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