Preparation of ultrathin gold films by oxygen-ion sputtering and their optical properties

被引：19
|
作者：
Stognij, AI [1 ]
Novitskii, NN [1 ]
Tushina, SD [1 ]
Kalinnikov, SV [1 ]
机构：
[1] Natl Acad Sci Belarus, Inst Solid State & Semicond Phys, Minsk 220072, BELARUS
来源：
TECHNICAL PHYSICS | 2003年 / 48卷 / 06期
关键词：
Oxygen; Gold; Argon; Optical Property; Electrical Property;
D O I：
10.1134/1.1583829
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The optical and electrical properties of gold films of thickness varying from less than 1 to 8 nm are studied. The films are obtained by sputtering with argon ion and oxygen ion beams. It is shown that the properties of the films are independent of the type of ions used for sputtering. The 1- to 5-nm-thick films are continuous and offer a high transparency. Sputtering by oxygen ion beams is used to produce NiOx/Au ohmic contacts to p-GaN. (C) 2003 MAIK "Nauka / Interperiodica".
引用
收藏
页码：745 / 748
页数：4
相关论文
共 50 条
  • [31] Preparation and optical properties of SiCN thin films deposited by reactive magnetron sputtering
    Qiang Li
    Yingnan Wang
    Xutao Shan
    Xuewen Wang
    Wu Zhao
    Journal of Materials Science: Materials in Electronics, 2017, 28 : 6769 - 6781
  • [32] Optical properties of oxygen-ion-implanted benzocyclobutene films
    Mada, Y
    Sugitani, S
    Arai, K
    Yamasaki, K
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2001, 19 (03): : 883 - 886
  • [33] OPTICAL, ELECTRICAL AND STRUCTURAL-PROPERTIES OF ULTRATHIN RF-SPUTTERED GOLD FILMS
    CORNELY, R
    FUSCHILL.N
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1973, 18 (01): : 16 - 16
  • [34] Preparation of crystalline Al2O3 films by ion beam sputtering combined with oxygen ion irradiation and their wear resistance properties
    Matsumura, N
    Hayashi, T
    JOURNAL OF THE JAPAN INSTITUTE OF METALS, 1997, 61 (06) : 528 - 534
  • [35] PREPARATION OF OXIDE FILMS BY REACTIVE SPUTTERING OF CARBIDES IN OXYGEN
    SINCLAIR, WR
    STILLING.DW
    AMERICAN CERAMIC SOCIETY BULLETIN, 1966, 45 (04): : 405 - &
  • [36] Preparation and properties of conducting polymeric ultrathin films
    Yang Ya-Jie
    Jiang Ya-Dong
    Xu Jian-Hua
    ACTA PHYSICO-CHIMICA SINICA, 2007, 23 (04) : 484 - 488
  • [37] Preparation of gold nanoparticles on ultrathin films of polythiophene and polythiophene derivatives
    Intelmann, CM
    Dietz, H
    Plieth, W
    EUROPEAN JOURNAL OF INORGANIC CHEMISTRY, 2005, (18) : 3711 - 3716
  • [38] Preparation and magnetic properties of 'Super Sendust' thin films by ion-beam sputtering
    Utsushikawa, Y.
    IEEE translation journal on magnetics in Japan, 1988, 3 (07): : 595 - 596
  • [39] Preparation and infrared absorption properties of Si/Ge multilayer films by ion beam sputtering
    Material Science and Engineering Department, Yunnan University, Kunming 650091, China
    不详
    Rengong Jingti Xuebao, 2006, 2 (280-284):
  • [40] EFFECTS OF OXYGEN-CONTENT ON THE OPTICAL-PROPERTIES OF TANTALUM OXIDE-FILMS DEPOSITED BY ION-BEAM SPUTTERING
    DEMIRYONT, H
    SITES, JR
    GEIB, K
    APPLIED OPTICS, 1985, 24 (04): : 490 - 495
12345