Active Disturbance Rejection Control for Discrete Systems

被引：0

作者：

Wang, Haiyan ^{[1
,2
]}

Pan, Tianhong ^{[1
]}

Gao, Zhiqiang ^{[3
]}

Jin, Huiyu ^{[4
]}

机构：

[1] Anhui Univ, Sch Elect Engn & Automat, Hefei 230601, Anhui, Peoples R China

[2] Jiangsu Univ, Sch Elect & Informat Engn, Zhenjiang 212013, Jiangsu, Peoples R China

[3] Cleveland State Univ, Fenn Coll Engn, Cleveland, OH 44115 USA

[4] Xiamen Univ, Sch Aerosp Engn, Xiamen 361005, Peoples R China

来源：

PROCEEDINGS OF 2020 IEEE 9TH DATA DRIVEN CONTROL AND LEARNING SYSTEMS CONFERENCE (DDCLS'20) | 2020年

关键词：

Active Disturbance Rejection Control; Discrete System; Semiconductor Manufacturing Process; Exponentially Weighted Moving Average; RUN CONTROL; OBSERVER;

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

A form of active disturbance rejection control (ADRC) is proposed for a kind of discrete systems in this paper. The state space form of the system is firstly formulated. Then the extended state observers (ESO) with and without model information are presented to estimate states and total disturbance. The control law is formulated to reject disturbance and to track a given trajectory. As a case study, the semiconductor manufacturing process is used to validate the proposed solution. Comparing with the exponentially weighted moving average controller, simulations indicate that the proposed discrete ADRC is effective in cancelling disturbance and in tracking the desired target.

引用

页码：378 / 382

页数：5

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