Micro-lens machining on optical fibers by direct laser ablation

被引:7
|
作者
Fricke-Begemann, T [1 ]
Li, JZ [1 ]
Ihlemann, J [1 ]
Herman, PR [1 ]
Marowsky, G [1 ]
机构
[1] Laser Lab Gottingen EV, Gottingen, Germany
关键词
fiber-lens; F-2-laser; 157; nm; fused silica; ablation; microfabrication;
D O I
10.1117/12.567671
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Beam shaping at the output of optical fibers is required in a variety of applications including optical sensors, telecommunication devices and medical applications. We present a laser micro-machining technique for the fabrication of micro-lenses directly upon the end face of silica fibers using a F-2-laser processing station. Ablation is performed in a mask projection arrangement with 25 x demagnification. A mask with an occluded circular beam shape is imaged perpendicular to the fiber axis. The fiber is rotated axially while the laser cuts through the fiber, yielding a spherically shaped tip with radius defined by the mask dimensions. Strong 157 nm absorption by the silica glass facilitates precise structuring without micro-crack formation. The quality of the fiber-lenses is characterized by AFM, SEM and by analysing the beam profile at the fiber output.
引用
收藏
页码:589 / 595
页数:7
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