Extending the resolution of emission images beyond diffraction limits using deconvolution

In this work, we demonstrate the effectiveness of deconvolution algorithms in improving the spatial resolution of time integrated emission images from integrated circuits. A mathematical model of the Point Spread Function (PSF) encompassing both the optical system and the imaging detector properties is used for the deconvolution process. Tuning of the PSF parameters is achieved through the minimization of dedicated cost functions that optimize image resolution while suppressing artifacts in the deconvoluted images. The optimized PSF is then used in both the Lucy-Richardson (L-R) and blind deconvolution algorithms. Results from 32 nm and 14 nm SOI devices show that the deconvolution process significantly improves spatial resolution of time-integrated emission images, pushing their resolution beyond the diffraction limit of Solid Immersion Lenses (SILs).