A DC-Pulse Power Supply Designed for Plasma Applications

被引：0
|
作者：
Yang, Yueh-Ru [1 ]
Lee, Wen-Yao [1 ]
机构：
[1] Ming Chi Univ Technol, Taishan Township 24301, Taipei County, Taiwan
来源：
2009 INTERNATIONAL CONFERENCE ON POWER ELECTRONICS AND DRIVE SYSTEMS, VOLS 1 AND 2 | 2009年
关键词：
Plasma applications; Pulse power;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A DC-pulse power supply designed for reactive sputtering plasma applications is presented in this paper. It consists of an H-bridge switching circuits and two DC sources. All pulse parameter values are set in a control panel developed with LabVIEW software. The designed panel adopts RS232 protocol to sequentially transmit the set parameter values to a low-cost 8-bit microcontroller. The microcontroller controls the switching sequences of the H-bridge circuit and the voltage of DC sources. Depending on the user's requirements, the designed power supply can offer positive and negative pulse trains, unipolar and bipolar pulse trains, symmetric and asymmetric pulse trains and other asymmetric pulse trains. The adjustable pulse parameters include pulse dominant time, recessive time, pulse levels and pulse numbers. Experimental results demonstrate that the desired pulsing functions of DC-pulse power supply are all achieved.
引用
收藏
页码：1464 / 1468
页数：5
相关论文
共 50 条
  • [41] Uninterruptible dc power supply
    不详
    CONTROL ENGINEERING, 2009, 56 (06) : 13 - 13
  • [42] Flexible quasi-solid-state SnO2/CNT supercapacitor processed by a dc-pulse nitrogen atmospheric-pressure plasma jet
    Liao, Chen-Yu
    Kuok, Fei-Hong
    Chen, Chieh-Wen
    Hsu, Cheng-Che
    Chen, Jian-Zhang
    JOURNAL OF ENERGY STORAGE, 2017, 11 : 237 - 241
  • [43] SUPERCONDUCTING PULSE POWER SUPPLY
    WIEDERHOLD, PR
    IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1964, MT12 (03) : 386 - &
  • [44] Comparison of high voltage DC power supply topologies for pulsed load applications
    Vishwanathan, N
    Ramanarayanan, V
    IECON'03: THE 29TH ANNUAL CONFERENCE OF THE IEEE INDUSTRIAL ELECTRONICS SOCIETY, VOLS 1 - 3, PROCEEDINGS, 2003, : 2747 - 2752
  • [45] Four switch Buck-Boost converter for telecom DC-DC power supply applications
    Ren, Xiaoyong
    Tang, Zhao
    Ruan, Xinbo
    Wei, Jian
    Hua, Guichao
    APEC 2008: TWENTY-THIRD ANNUAL IEEE APPLIED POWER ELECTRONICS CONFERENCE AND EXPOSITION, VOLS 1-4, 2008, : 1527 - +
  • [46] A High-Power High-Voltage Power Supply for Long-Pulse Applications
    Pokryvailo, Alex
    Carp, Costel
    Scapellati, Clifford
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2010, 38 (10) : 2604 - 2610
  • [47] APPLICATION OF PULSE POWER SUPPLY FOR DIAMOND COATINGS DEPOSITION IN GLOW DISCHARGE PLASMA
    Koshevoy, K. I.
    Volkov, Yu. Ya.
    Strel'nitskij, V. E.
    Reshetnyak, E. N.
    PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY, 2019, (01): : 197 - 200
  • [48] Preface to special issue on recent technologies and applications of repetitive pulse power supply
    Jiang, Weihua
    IEEJ Transactions on Fundamentals and Materials, 2019, 139 (10)
  • [49] High Voltage Pulse Speed Study for High Voltage DC-DC Power Supply Based on Voltage Multipliers
    Mao, Saijun
    Popovic, Jelena
    Ferreira, Jan Abraham
    2015 17TH EUROPEAN CONFERENCE ON POWER ELECTRONICS AND APPLICATIONS (EPE'15 ECCE-EUROPE), 2015,
  • [50] MODELING OF PREBREAKDOWN VI-CHARACTERISTICS OF A WIRE PLATE ELECTROSTATIC PRECIPITATOR OPERATING UNDER COMBINED DC-PULSE ENERGIZATION
    RAJANIKANTH, BS
    PRABHAKAR, BR
    IEEE TRANSACTIONS ON DIELECTRICS AND ELECTRICAL INSULATION, 1994, 1 (06) : 1058 - 1067
12345