Design and Microfabrication of Frequency Selective Uncooled Microbolometer Focal Plane Array for Terahertz Imaging

被引：0

作者：

Oulachgar, H. ^{[1
]}

Mauskopf, P. ^{[2
]}

Bolduc, M. ^{[1
]}

Ilias, S. ^{[1
]}

Paultre, J-E. ^{[1
]}

D'Amato, D. ^{[1
]}

Terroux, M. ^{[1
]}

Pope, T. ^{[1
]}

Alain, C. ^{[1
]}

Topart, P. ^{[1
]}

Jerominek, H. ^{[1
]}

机构：

[1] INO, Quebec City, PQ, Canada

[2] Cardiff Univ, Cardiff, Wales

来源：

2013 38TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES (IRMMW-THZ) | 2013年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A THz frequency selective microbolometer focal plane array (FPA) with 35 mu m pixel pitch and a resolution of 384x288 pixels was recently developed at INO. The FPA was fabricated on a CMOS readout circuit using MEMS surface micromachining techniques. The uncooled microbolometer detectors, based on vanadium oxide technology, were optimized for detection at 4.25 THz. A high performance frequency selective THz camera operating at 4.25 THz was also demonstrated.

引用

页数：2

共 50 条

[1] Externally Triggered Terahertz Imaging For Microbolometer Focal Plane Array
Oda, Naoki
Sudou, Takayuki
Morimoto, Takao
Ishi, Tsutomu
Okubo, Syuichi
Isoyama, Goro
Irizawa, Akinori
Kawase, Keigo
Kato, Ryukou
[J]. 2015 40TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER AND TERAHERTZ WAVES (IRMMW-THZ), 2015,
[2] An uncooled microbolometer infrared focal plane array in standard CMOS
Tezcan, DS
Eminoglu, S
Akar, OS
Akin, T
[J]. PHOTODETECTORS: MATERIALS AND DEVICES VI, 2001, 4288 : 112 - 121
[3] Uncooled microbolometer mosaic focal plane arrays for the infrared and terahertz ranges
Dem’yanenko M.A.
Kozlov A.I.
Novoselov A.R.
Ovsyuk V.N.
[J]. Optoelectronics, Instrumentation and Data Processing, 2016, 52 (02) : 203 - 209
[4] Sensitivity of a vanadium oxide uncooled microbolometer array for terahertz imaging
Coppinger, Matthew J.
Sustersic, Nathan A.
Kolodzey, James
Allik, Toomas H.
[J]. OPTICAL ENGINEERING, 2011, 50 (05)
[5] Spectral Characterization of a Microbolometer Focal Plane Array at Terahertz Frequencies
Jang, Dogeun
Kimbrue, Malik
Yoo, Yung-Jun
Kim, Ki-Yong
[J]. IEEE TRANSACTIONS ON TERAHERTZ SCIENCE AND TECHNOLOGY, 2019, 9 (02) : 150 - 154
[6] Investigation of Uncooled Microbolometer Focal Plane Array Infrared Camera for Quantitative Thermography
Joseph N. Zalameda
William P. Winfree
[J]. Journal of Nondestructive Evaluation, 2005, 24 : 1 - 9
[7] 320x240 microbolometer focal plane array for uncooled applications
Radford, W
Murphy, D
Ray, M
Propst, S
Kennedy, A
Soch, K
Coda, R
Lung, G
Moody, E
Gleichman, D
[J]. PHOTODETECTORS: MATERIALS AND DEVICES, 1996, 2685 : 80 - 90
[8] Investigation of uncooled microbolometer focal plane array infrared camera for quantitative thermography
Zalameda, JN
Winfree, WP
[J]. JOURNAL OF NONDESTRUCTIVE EVALUATION, 2005, 24 (01) : 1 - 9
[9] Uncooled Microbolometer Infrared Focal Plane Array without Substrate Temperature Stabilization
Liu, Huifang
Que, Longcheng
Niu, Runmei
Yuan, Kai
[J]. 4TH INTERNATIONAL CONFERENCE ON MECHANICAL AUTOMATION AND MATERIALS ENGINEERING (ICMAME 2015), 2015, : 55 - 58
[10] Uncooled Microbolometer Infrared Focal Plane Array Without Substrate Temperature Stabilization
Lv, Jian
Que, Longcheng
Wei, Linhai
Zhou, Yun
Liao, Baobin
Jiang, Yadong
[J]. IEEE SENSORS JOURNAL, 2014, 14 (05) : 1533 - 1544

← 1 2 3 4 5 →