Miniature sensor suitable for electronic nose applications

被引:26
|
作者
Pinnaduwage, Lal A.
Gehl, Anthony C.
Allman, Steve L.
Johansson, Alicia
Boisen, Anja
机构
[1] Oak Ridge Natl Lab, Oak Ridge, TN 37831 USA
[2] Univ Tennessee, Dept Phys, Knoxville, TN 37996 USA
[3] Tech Univ Denmark, Dept Micro & Nanotechnol, DK-2800 Lyngby, Denmark
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 2007年 / 78卷 / 05期
关键词
D O I
10.1063/1.2735841
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A major research effort has been devoted over the years for the development of chemical sensors for the detection of chemical and explosive vapors. However, the deployment of such chemical sensors will require the use of multiple sensors (probably tens of sensors) in a sensor package to achieve selective detection. In order to keep the overall detector unit small, miniature sensors with sufficient sensitivity of detection will be needed. We report sensitive detection of dimethyl methylphosphonate (DMMP), a stimulant for the nerve agents, using a miniature sensor unit based on piezoresistive microcantilevers. The sensor can detect parts-per-trillion concentrations of DMMP within 10 s exposure times. The small size of the sensor makes it ideally suited for electronic nose applications. (C) 2007 American Institute of Physics.
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页数:4
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