Fabrication of three-dimensional 1 x 4 splitter waveguides inside a glass substrate with spatially phase modulated laser beam

被引:66
|
作者
Sakakura, Masaaki [1 ]
Sawano, Tsutomu [2 ]
Shimotsuma, Yasuhiko [1 ]
Miura, Kiyotaka [3 ]
Hirao, Kazuyuki [3 ]
机构
[1] Kyoto Univ, Off Society Acad Collaborat Innovat, Kyoto 6158520, Japan
[2] NEW GLASS FORUM, Res Lab, Kyoto 6158510, Japan
[3] Kyoto Univ, Grad Sch Engn, Dept Chem Mat, Kyoto 6158510, Japan
来源
OPTICS EXPRESS | 2010年 / 18卷 / 12期
关键词
FEMTOSECOND LASER; INTEGRATED-OPTICS; COMPONENTS; DESIGN;
D O I
10.1364/OE.18.012136
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Multiple light spots can be generated by modulating the spatial phase distribution of laser beam with a spatial light modulator (SLM). In this paper, we demonstrate the fabrication of three-dimensional 1 x 4 splitter waveguides inside a glass by focusing multiple light spots of femtosecond (fs) laser pulses, which can be controlled by switching spatial phase distributions on an SLM. In the conventional fs laser writing technique, a highly precise positioning of a substrate is essential for fabricating a branched waveguide in a splitter. Using the technique proposed in this paper, a continuously branched waveguide can be produced easily by translating a glass substrate only one time; therefore this technique can eliminate the need for a high precision in positioning of a substrate and save a fabrication time. (C)2010 Optical Society of America
引用
收藏
页码:12136 / 12143
页数:8
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