Fabrication of hollow optical waveguides in fused silica by three-dimensional femtosecond laser micromachining

We report on the fabrication of hollow optical waveguides in fused silica using femtosecond laser micromachining. We show that in such hollow waveguides, high-intensity femtosecond laser beams can be guided with low optical loss. Our technique, which was established earlier for fabrication of optofluidic structures in glass, can ensure a high smoothness at the inner surfaces of the hollow waveguides and provide the unique capability of fabrication of hollow waveguides with complex geometries and configurations. A transmission of ∼90% at 633 nm wavelength is obtained for a 62-mm-long hollow waveguide with an inner diameter of ∼250 μm. In addition, nonlinear propagation of femtosecond laser pulses in the hollow waveguide is demonstrated, showing that the spectral bandwidth of the femtosecond pulses can be broadened from ∼27.2 to ∼55.7 nm.