The structural properties of the Co35Pd65 films, made by oblique-incidence deposition, were discussed from the X-ray rocking curve studies. For the purpose of this study, these samples were used again for the stress and the magnetic hysteresis measurements, respectively. The intrinsic stress of these films is tensile and of the order of 10(9)-10(10) dyn/cm(2). In general, if the film thickness t > t(C)congruent to 500-700 Angstrom, the sample exhibits the characteristics of the out-of-him-plane (or normal) anisotropy. On the other hand, if t < t(C), the film shape and the dispersion effect in the sample becomes so large that magnetization is almost in-plane. Besides, as t is fixed and t > t(C), the dispersion effect in the alpha = 45 degrees film is larger than that in the alpha = 0 degrees film, where alpha is the angle of incidence. Three possible mechanisms, i.e. the magnetostatic, the magnetocrystalline, and the magnetoelastic mechanisms, are proposed to explain the magnetic anisotropy phenomena observed in these Co35Pd65 films. From model calculations, it is concluded that the last mechanism is the most likely to account for the anisotropy. Finally, based on the magnetocrystalline effect, the variations of the degree of magnetic dispersion, due to the change of a from 0 to 45 degrees, are discussed briefly. (C) 2000 Elsevier Science B.V. Al rights reserved.