High frequency SAW devices on algan:: Fabrication, characterization and integration with optoelectronics

被引：23
|
作者：
Palacios, T [1 ]
Calle, F [1 ]
Grajal, J [1 ]
Monroy, E [1 ]
Eickhoff, M [1 ]
Ambacher, O [1 ]
Omnès, F [1 ]
机构：
[1] Univ Politecn Madrid, ISOM, ETSI Telecomun, E-28040 Madrid, Spain
来源：
2002 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2 | 2002年
关键词：
D O I：
10.1109/ULTSYM.2002.1193352
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
In. this paper, the technology and properties of surface acoustic wave (SAW) devices on AlN and GaN films are reviewed. The excellent characteristics of these materials for high frequency applications are demonstrated by the fabrication of SAW filters with central frequencies higher than 2.2 GHz. The thermal behavior of these filters has been analyzed. Finally, the integration of a SAW generator with a metal-semiconductor-metal photodetector is described, showing the important synergy resulting from such integration.
引用
收藏
页码：57 / 60
页数：4
相关论文
共 50 条
  • [1] Integration of optoelectronics and SAW technology
    Schiopu, Paul
    Grosu, Neculai
    Manea, Adrian
    Craciun, Alexandru
    ADVANCED TOPICS IN OPTOELECTRONICS, MICROELECTRONICS, AND NANOTECHNOLOGIES V, 2010, 7821
  • [2] High frequency SAW devices
    Hines, JH
    Malocha, DC
    1997 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS I-III: HIGH FREQUENCIES IN HIGH PLACES, 1997, : 177 - 180
  • [3] Research of micro area piezoelectric properties of AlN films and fabrication of high frequency SAW devices
    Wang, Fang
    Xiao, Fuliang
    Song, Dianyou
    Qian, Lirong
    Feng, Yulin
    Fu, Bangran
    Dong, Kaifei
    Li, Can
    Zhang, Kailiang
    MICROELECTRONIC ENGINEERING, 2018, 199 : 63 - 68
  • [4] High throughput integration of optoelectronics devices for biochip fluorescent detection
    Thrush, E
    Levi, O
    Wang, K
    Harris, JS
    Smith, SJ
    MICROFLUIDICS, BIOMEMS, AND MEDICAL MICROSYSTEMS, 2003, 4982 : 162 - 169
  • [5] High precision characterization of SAW materials and devices
    Weihnacht, M
    Franke, K
    Kammer, K
    Kunze, R
    Schmidt, H
    1997 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 & 2, 1997, : 217 - 220
  • [6] Fabrication of high frequency SAW devices using tri-layer lift-off photolithography
    Kelly, Liam
    Northfield, Howard
    Rashid, Sabaa
    Bao, Xiaoyi
    Berini, Pierre
    MICROELECTRONIC ENGINEERING, 2022, 253
  • [7] High frequency optical probe for BAW/SAW devices
    Chambon, Hugo
    Nicolay, Pascal
    Moldaschl, Thomas
    Zauner, Markus
    Humbert, Claude
    Awan, Aoun Amin
    Schiek, Maximilian
    Metzger, Thomas
    Benjeddou, Ayech
    2018 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2018,
  • [8] Design and Fabrication of Nanoscale IDTs Using Electron Beam Technology for High-Frequency SAW Devices
    Shih, Wei-Che
    Chen, Ying-Chung
    Chang, Wei-Tsai
    Cheng, Chien-Chuan
    Liao, Pei-Chun
    Kao, Kuo-Sheng
    JOURNAL OF NANOMATERIALS, 2014, 2014
  • [9] ZnO thin films for high frequency SAW devices
    Ieki, H
    Kadota, M
    1999 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2, 1999, : 281 - 289
  • [10] Application areas for high frequency, high functional SAW devices expand
    Kameyama, Korenori
    JEE. Journal of electronic engineering, 1988, 25 (259): : 34 - 37
12345