SrTiO3 Thin Film Decoupling Capacitors on Si Interposers for 3D System Integration

Simultaneous switching noise (SSN) suppression is a serious problem when operating 3-dimentional large-scale integrated circuits (3D LSIs). Thin film capacitors directly connected to LSIs using 3D integration technology are expected to reduce impedance for a power distribution network (PDN). We fabricated various multi-terminal 10 x 10 mm SrTiO3 thin film capacitors with the capacitance values larger than 1 mu F, and explored the impedance in a high frequency region. The equivalent series resistance (ESR) and equivalent series inductance (ESL) values for the metal-insulator-metal (NEW) capacitors are affected by the number of contacts. Typically, the ESR values are less than I m Omega and the ESL values are estimated to be a few pH. The SrTiO3 NUM capacitors on Si interposers are suitable for reducing both self- and transfer-impedance of a PDN for 3D-LSIs.