Diode laser based speckle interferometry for dimensional measurements

被引：0

作者：

Pfeifer, T ^{[1
]}

Wegner, R ^{[1
]}

Mischo, H ^{[1
]}

机构：

[1] Fraunhofer Inst Prod Technol, D-52074 Aachen, Germany

来源：

TECHNISCHES MESSEN | 1998年 / 65卷 / 03期

关键词：

D O I：

暂无

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In Electronic Speckle-Pattern Interferometry (ESPI) the utilization of tuneable diode lasers enables us to measure the 3D topography of technical freeform surfaces. The resolution of this so-called Two Wavelength ESPI (TWESPI) depends decisively on the tuneable wavelength range of the used laser source. With a Distributed-Bragg-Reflector Laser (DBR-Laser) shape measurements were carried out successfully. In this paper new methods for the extension of the measurement range, for phase-shifting and for calibration purposes will be presented. Moreover a set-up for the combined measurement of deformation and shape will be introduced and the obtained results will be shown.

引用

页码：96 / 104

页数：9

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