Diode laser based speckle interferometry for dimensional measurements

被引：0
|
作者：
Pfeifer, T [1 ]
Wegner, R [1 ]
Mischo, H [1 ]
机构：
[1] Fraunhofer Inst Prod Technol, D-52074 Aachen, Germany
来源：
TECHNISCHES MESSEN | 1998年 / 65卷 / 03期
关键词：
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
In Electronic Speckle-Pattern Interferometry (ESPI) the utilization of tuneable diode lasers enables us to measure the 3D topography of technical freeform surfaces. The resolution of this so-called Two Wavelength ESPI (TWESPI) depends decisively on the tuneable wavelength range of the used laser source. With a Distributed-Bragg-Reflector Laser (DBR-Laser) shape measurements were carried out successfully. In this paper new methods for the extension of the measurement range, for phase-shifting and for calibration purposes will be presented. Moreover a set-up for the combined measurement of deformation and shape will be introduced and the obtained results will be shown.
引用
收藏
页码：96 / 104
页数：9
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